Keyword search (4,164 papers available)

"Packirisamy M" Authored Publications:

Title Authors PubMed ID
1 Proximal sound printing: direct 3D printing of microstructures on polymers Foroughi S; Habibi M; Packirisamy M; 41500993
ENCS
2 Improved electrical performance of PDMS and PEDOT: PSS composites with MWCNT and AgNP particles Shafagh SH; Deen I; Packirisamy M; 41424586
ENCS
3 Robust and Compact Electrostatic Comb Drive Arrays for High-Performance Monolithic Silicon Photonics Fasihanifard M; Packirisamy M; 41156349
ENCS
4 Angled electrode comb drives for enhanced actuator in silicon photonic applications Fasihanifard M; Packirisamy M; 41130948
ENCS
5 Microfluidic Liquid Biopsy Minimally Invasive Cancer Diagnosis by Nano-Plasmonic Label-Free Detection of Extracellular Vesicles: Review Neriya Hegade KP; Bhat RB; Packirisamy M; 40650129
ENCS
6 Alzheimer model chip with microglia BV2 cells Yazdanpanah Moghadam E; Sonenberg N; Packirisamy M; 40623989
ENCS
7 Printing of Cantilevers and Millifluidic Devices Using Ultrasound Waves Foroughi S; Karamzadeh V; Habibi M; Packirisamy M; 40538575
ENCS
8 PEDOT:PSS-MWCNT Nanocomposite Wire for Routing in Energy Harvesting Devices Shafagh SH; Deen I; Mamsapuram Panneerselvam D; Packirisamy M; 40283259
ENCS
9 Microfluidic Wound-Healing Assay for Comparative Study on Fluid Dynamic, Chemical and Mechanical Wounding on Microglia BV2 Migration Yazdanpanah Moghadam E; Sonenberg N; Packirisamy M; 39203655
ENCS
10 Holographic direct sound printing Derayatifar M; Habibi M; Bhat R; Packirisamy M; 39107289
ENCS
11 Microfluidic Wound-Healing Assay for ECM and Microenvironment Properties on Microglia BV2 Cells Migration Yazdanpanah Moghadam E; Sonenberg N; Packirisamy M; 36832056
ENCS
12 Microfluidics in smart packaging of foods Pou KRJ; Raghavan V; Packirisamy M; 36192908
ENCS
13 Gold Nano-Bio-Interaction to Modulate Mechanobiological Responses for Cancer Therapy Applications Sohrabi Kashani A; Larocque K; Piekny A; Packirisamy M; 35839330
BIOLOGY
14 Microfluidic Platforms for the Isolation and Detection of Exosomes: A Brief Review Raju D; Bathini S; Badilescu S; Ghosh A; Packirisamy M; 35630197
ENCS
15 Direct sound printing Habibi M; Foroughi S; Karamzadeh V; Packirisamy M; 35387993
ENCS
16 Arraying of microphotosynthetic power cells for enhanced power output Kuruvinashetti K; Packirisamy M; 35359612
ENCS
17 Simple, Economical Methods for the Culture of Green Algae for Energy Harvesting from Photosynthesis in a Microfluidic Environment Kuruvinashetti K; Rahimi S; Pakkiriswami S; Packirisamy M; 34898042
ENCS
18 Magnetic particle based liquid biopsy chip for isolation of extracellular vesicles and characterization by gene amplification Bathini S; Pakkiriswami S; Ouellette RJ; Ghosh A; Packirisamy M; 34517262
ENCS
19 Cancer-Nano-Interaction: From Cellular Uptake to Mechanobiological Responses Sohrabi Kashani A; Packirisamy M; 34502495
ENCS
20 Optical Fiber Array Sensor for Force Estimation and Localization in TAVI Procedure: Design, Modeling, Analysis and Validation Bandari N; Dargahi J; Packirisamy M; 34450813
ENCS
21 Using intracellular plasmonics to characterize nanomorphology in human cells. Sohrabi Kashani A, Piekny A, Packirisamy M 33365137
BIOLOGY
22 Cancer cells optimize elasticity for efficient migration. Kashani AS; Packirisamy M; 33204453
ENCS
23 Gold Nano-Island Platforms for Localized Surface Plasmon Resonance Sensing: A Short Review. Badilescu S, Raju D, Bathini S, Packirisamy M 33066088
ENCS
24 Toward Task Autonomy in Robotic Cardiac Ablation: Learning-Based Kinematic Control of Soft Tendon-Driven Catheters. Jolaei M, Hooshiar A, Dargahi J, Packirisamy M 32678722
ENCS
25 Lab-On-A-Chip for the Development of Pro-/Anti-Angiogenic Nanomedicines to Treat Brain Diseases. Subramaniyan Parimalam S, Badilescu S, Sonenberg N, Bhat R, Packirisamy M 31817343
ENCS
26 Nano-Bio Interactions of Extracellular Vesicles with Gold Nanoislands for Early Cancer Diagnosis. Bathini S, Raju D, Badilescu S, Kumar A, Ouellette RJ, Ghosh A, Packirisamy M 31549028
ENCS
27 Flow force augmented 3D suspended polymeric microfluidic (SPMF3 ) platform. Marzban M, Dargahi J, Packirisamy M 30025169
ENCS
28 Tuning of Morphology and Stability of Gold Nanostars Through pH Adjustment. Kumar R, Badilescu S, Packirisamy M 30913757
ENCS
29 Efficient Low Shear Flow-based Trapping of Biological Entities. Sohrabi Kashani A, Packirisamy M 30940862
ENCS
30 Acoustofluidic Micromixing Enabled Hybrid Integrated Colorimetric Sensing, for Rapid Point-of-Care Measurement of Salivary Potassium. Surendran V, Chiulli T, Manoharan S, Knisley S, Packirisamy M, Chandrasekaran A 31141923
ENCS
31 The effect of hydrogen nanobubbles on the morphology of gold-gelatin bionanocomposite films and their optical properties. Alsawafta M, Badilescu S, Truong VV, Packirisamy M 22248640
PHYSICS

 

Title:Robust and Compact Electrostatic Comb Drive Arrays for High-Performance Monolithic Silicon Photonics
Authors:Fasihanifard MPackirisamy M
Link:https://pubmed.ncbi.nlm.nih.gov/41156349/
DOI:10.3390/mi16101102
Publication:Micromachines
Keywords:MEMS actuatorselectrostatic comb driveforce intensity optimizationsilicon photonicsslab waveguide actuation
PMID:41156349 Category: Date Added:2025-10-29
Dept Affiliation: ENCS
1 Optical-Bio Microsystems Laboratory, Department of Mechanical, Industrial and Aerospace Engineering, Concordia University, 1515 St. Catherine W., Montreal, QC H3G 2W1, Canada.

Description:

Actuating monolithic photonic components (particularly slab waveguides) requires higher force due to their inherent stiffness. However, two primary constraints must be addressed: actuator footprint and fabrication limits. Increasing the number of fingers to provide the required force is not a viable solution due to space constraints, and we must also adhere to the process design kits of standard fabrications and respect their design limits. Therefore, it is crucial to increase the actuator force output without significantly enlarging the actuator footprint while maintaining the necessary travel range. In order to achieve this, we utilize arrays of electrostatic comb drives, with each repeating cell geometry optimized to produce the highest force per actuator footprint. Our optimization strategy focuses on finger geometry, the arrangement of fingers and arms design in the comb structure, including the number of fingers per arm and arm length, ensuring that each repeating cell delivers maximum force per unit area or force intensity. Co-optimizing a repeatable, footprint-optimized comb-array unit cell (arm length, arm width, finger pitch, finger count) and validating it against an asymmetric slab waveguide load, we reach a maximum pre-pull-in force intensity of about 342 N m-2 at 70 V with about 6 µm travel, confirmed by analytical modeling, numerical simulation, and measurement. Despite fabrication challenges such as over-etching and variations in electrode dimensions, detailed SEM analyses and correction functions ensure that the theoretical models closely match the experimental data, confirming the robustness and accuracy of the design. These optimized actuators, capable of achieving substantial force output without sacrificing travel range or mechanical stability, are particularly effective for applications in optical beam steering for in-plane silicon-photonics and related optical microsystems applications.





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